The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2023
Filed:
Feb. 18, 2021
Applicant:
Mitsubishi Chemical Corporation, Tokyo, JP;
Inventors:
Toshiaki Shibata, Tokyo, JP;
Yasuhiro Kawase, Tokyo, JP;
Ken Harada, Tokyo, JP;
Atsushi Ito, Tokyo, JP;
Tomohiro Kusano, Tokyo, JP;
Yutaro Takeshita, Tokyo, JP;
Assignee:
Mitsubishi Chemical Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C11D 11/00 (2006.01); C11D 7/32 (2006.01); C11D 7/26 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C11D 7/3281 (2013.01); C11D 7/265 (2013.01); C11D 7/3209 (2013.01); C11D 11/0047 (2013.01); H01L 21/02074 (2013.01);
Abstract
The present invention relates to a cleaning liquid containing a component (A): a compound represented by the following formula (1), component (B): alkylamine, component (C): polycarboxylic acid, and component (D): ascorbic acid, in which a mass ratio of the component (A) to a total mass of the component (B) and the component (C) is 1 to 15, and in the formula (1), R, R, and Reach have a definition same as the definition described in the description,