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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11597040 B1

PDFFull Text
Date of Patent:
Mar. 07, 2023

Filed:

Mar. 13, 2018

Laser processing apparatus

Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Hiroshi Morikazu, Tokyo, JP;

Noboru Takeda, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:

Greer, Burns & Crain, Ltd.

Primary Examiner:

Erin E McGrath

Assistant Examiner:

Ahmad Abdel-Rahman

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/268 (2006.01); B23K 26/53 (2014.01); B23K 26/0622 (2014.01); B23K 26/06 (2014.01); B23K 26/08 (2014.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); B23K 101/40 (2006.01); H01L 21/78 (2006.01);
U.S. Cl.
CPC ...
B23K 26/53 (2015.10); B23K 26/0622 (2015.10); B23K 26/0624 (2015.10); B23K 26/0665 (2013.01); B23K 26/0853 (2013.01); H01L 21/268 (2013.01); H01L 21/67115 (2013.01); H01L 21/681 (2013.01); H01L 21/6838 (2013.01); B23K 2101/40 (2018.08); H01L 21/67092 (2013.01); H01L 21/78 (2013.01);
Abstract

A laser beam irradiation unit of a laser processing apparatus includes: a laser oscillator in which a repetition frequency is set so as to oscillate a pulsed laser having a pulse width shorter than a time of electronic excitation caused by irradiating the workpiece with a laser beam and oscillate at least two pulsed lasers within the electronic excitation time; a condenser that irradiates the workpiece held on the chuck table with the pulsed laser beams oscillated by the laser oscillator; and a thinning-out unit that is disposed between the laser oscillator and the condenser and guides the pulsed laser beams necessary for processing to the condenser by thinning out and discarding pulsed laser beams in a predetermined cycle.

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