The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2023
Filed:
Sep. 17, 2020
Kla Corporation, Milpitas, CA (US);
Ilya Bezel, Mountain View, CA (US);
Leonid Borisovich Zvedenuk, Moscow, RU;
Andrey Evgenievich Stepanov, Moscow, RU;
Maksim Alexandrovich Deminskii, Moscow, RU;
Boris Vasilyevich Potapkin, Moscow, RU;
KLA Corporation, Milpitas, CA (US);
Abstract
A broadband light source is disclosed. The broadband light source includes a rotatable gas containment structure. The broadband light source includes a rotational drive system configured to rotate the rotatable gas containment structure about the horizontal axis of rotation of the rotatable gas containment structure. The broadband light source includes a pump source configured to generate pump illumination and a reflector element configured to direct a portion of the pump illumination into the gas to sustain a plasma. The reflector is configured to collect a portion of broadband light emitted from the plasma.