The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 28, 2023

Filed:

Jun. 15, 2018
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Germar Schneider, Dresden, DE;

Matthias Taubert, Radebeul, DE;

Michael Mitrach, Dresden, DE;

Thomas Gadau, Dresden, DE;

Markus Pfeifenberger, Metnitz, AT;

Walter Leitgeb, Wernberg, AT;

Frank Boenewitz, Dresden, DE;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/673 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6773 (2013.01); H01L 21/67161 (2013.01); H01L 21/67373 (2013.01); H01L 21/67376 (2013.01); H01L 21/67379 (2013.01); H01L 21/67383 (2013.01); H01L 21/67389 (2013.01); H01L 21/67396 (2013.01); H01L 21/67733 (2013.01);
Abstract

According to various embodiments, a frame cassette includes a housing and a mounting structure within the housing. The mounting structure includes a plurality of tape-frame slots, each tape-frame slot configured to receive a tape-frame. The housing includes an opening configured to introduce a tape-frame into a tape-frame slot of the plurality of tape-frame slots, or to remove the tape frame from the tape-frame slot of the plurality of tape-frame slots. The housing also includes an electrostatic discharge protection. A corresponding automatic transportation system and method of automatic transportation of semiconductor wafers is also provided.


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