The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2023
Filed:
Mar. 19, 2020
Applicant:
Kctech Co., Ltd., Gyeonggi-do, KR;
Inventors:
Jae Won Lee, Seoul, KR;
Ju Young Lee, Gyeonggi-do, KR;
Kyung Cheol Jeong, Chungcheongbuk-do, KR;
Jun Ho Lee, Gyeonggi-do, KR;
Yong Guk Park, Gyeonggi-do, KR;
Assignee:
KCTECH CO., LTD., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01K 13/02 (2021.01); G01K 1/14 (2021.01); G01K 1/143 (2021.01);
U.S. Cl.
CPC ...
G01K 13/02 (2013.01); G01K 1/14 (2013.01); G01K 1/143 (2013.01); G01K 13/026 (2021.01);
Abstract
Disclosed is a temperature detection device. The device for detecting temperature of a processing liquid for substrate processing according to an embodiment includes a temperature measurement sensor installed adjacent to an outer surface of a tube through which the processing liquid flows, in which the temperature measurement sensor senses the temperature of the processing liquid in the tube.