The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2023
Filed:
Dec. 15, 2021
Nanya Technology Corporation, New Taipei, TW;
Chun-Cheng Liao, New Taipei, TW;
NANYA TECHNOLOGY CORPORATION, New Taipei, TW;
Abstract
The present disclosure relates to method for preparing a semiconductor device with a composite landing pad. The method includes forming a first dielectric layer over a semiconductor substrate. The semiconductor device also includes forming a lower metal plug and a barrier layer in the first dielectric layer. The lower metal plug is surrounded by the barrier layer. The semiconductor device further includes forming an inner silicide portion over the lower metal plug, and an outer silicide portion over the barrier layer. A topmost surface of the outer silicide portion is higher than a topmost surface of the inner silicide portion.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile