The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2023
Filed:
Apr. 07, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Dhritiman Subha Kashyap, Bangalore, IN;
Chaowei Wang, San Jose, CA (US);
Kartik Shah, Saratoga, CA (US);
Kevin Griffin, Livermore, CA (US);
Karthik Ramanathan, Bangalore, IN;
Hanhong Chen, Milpitas, CA (US);
Joseph AuBuchon, San Jose, CA (US);
Sanjeev Baluja, Campbell, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods, software systems and processes to develop surrogate model-based optimizers for controlling and optimizing flow and pressure of purges between a showerhead and a heater having a substrate support to control non-uniformity inherent in a processing chamber due to geometric configuration and process regimes. The flow optimizer process utilizes experimental data from optimal process space coverage models, generated simulation data and statistical machine learning tools (i.e. regression models and global optimizers) to predict optimal flow rates for any user-specified process regime.