The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2023
Filed:
Aug. 05, 2019
Honeywell International Inc., Morris Plains, NJ (US);
Jaeyeon Kim, Liberty Lake, WA (US);
Patrick Underwood, Spokane, WA (US);
Susan D. Strothers, Mead, WA (US);
Shih-Yao Lin, Hsinchu, TW;
Michael D. Payton, Rockford, WA (US);
Scott R. Sayles, Mead, WA (US);
Honeywell International Inc., Charlotte, NC (US);
Abstract
A sputtering chamber component including a front surface, a back surface opposite the front surface, and a sputter trap formed on at least a portion of the back surface, and a coating of metallic particles formed on the sputter trap. The coating has a thickness from about 0.025 mm to about 2.54 mm (0.001 inches to about 0.1 inches) and is substantially free of impurities, and the particles of the coating are substantially diffused.