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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11582854 B1

PDFFull Text
Date of Patent:
Feb. 14, 2023

Filed:

Nov. 19, 2019

Mounting table and charge neutralization method for target object

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventor:

Takehiro Ueda, Miyagi, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

Weihrouch IP

Primary Examiner:

Jany Richardson

Int. Cl.
CPC ...
H05F 3/06 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H05F 3/06 (2013.01); H01J 37/3244 (2013.01); H01J 37/32724 (2013.01); H01L 21/67069 (2013.01); H01L 21/6833 (2013.01); H01J 37/32091 (2013.01); H01J 2237/334 (2013.01); H01L 21/6875 (2013.01); H01L 21/68785 (2013.01);
Abstract

A mounting table is provided. The mounting table includes an electrostatic chuck configured to mount thereon a target object and attract and hold the target object using an electrostatic force, and a gas supply line configured to supply a gas to a gap between the target object mounted on the electrostatic chuck and the electrostatic chuck via the electrostatic chuck. The mounting table further includes at least one irradiation unit configured to irradiate light having a predetermined wavelength to the gas flowing through the gas supply line or to the gas supplied to the gap between the target object and the electrostatic chuck to ionize the gas.

Find Patent Forward Citations

Quick Actions:

Ueda, Takehiro. (2023). Mounting table and charge neutralization method for target object (U.S. Patent No. 11582854). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11582854

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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