The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2023
Filed:
Sep. 23, 2020
Kla Corporation, Milpitas, CA (US);
Bjorn Brauer, Beaverton, OR (US);
Vaibhav Gaind, Fremont, CA (US);
KLA Corp., Milpitas, CA (US);
Abstract
Methods and systems for aligning images of a specimen generated with different modes of an imaging subsystem are provided. One method includes separately aligning first and second images generated with first and second modes, respectively, to a design for the specimen. For a location of interest in the first image, the method includes generating a first difference image for the location of interest and the first mode and generating a second difference image for the location of interest and the second mode. The method also includes aligning the first and second difference images to each other and determining information for the location of interest from results of the aligning.