The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 14, 2023

Filed:

Sep. 01, 2017
Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventors:

Jing Zhang, Santa Clara, CA (US);

Ravi Chandra Donapati, Ann Arbor, MI (US);

Mark Roulo, Mountain View, CA (US);

Kris Bhaskar, San Jose, CA (US);

Assignee:

KLA-Tenor Corp., Milpitas, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06N 3/08 (2006.01); G06N 3/04 (2006.01); G06K 9/62 (2022.01); G06V 10/40 (2022.01); G06V 10/44 (2022.01); G06T 7/00 (2017.01); G06N 3/082 (2023.01); G06N 3/084 (2023.01);
U.S. Cl.
CPC ...
G06N 3/082 (2013.01); G06K 9/6261 (2013.01); G06K 9/6274 (2013.01); G06N 3/0454 (2013.01); G06N 3/084 (2013.01); G06T 7/0004 (2013.01); G06V 10/40 (2022.01); G06V 10/454 (2022.01); G06K 9/6256 (2013.01); G06K 9/6263 (2013.01); G06K 9/6267 (2013.01); G06T 2207/10056 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/20081 (2013.01); G06T 2207/20084 (2013.01); G06T 2207/30148 (2013.01); G06V 2201/06 (2022.01);
Abstract

Methods and systems for performing diagnostic functions for a deep learning model are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a deep learning model configured for determining information from an image generated for a specimen by an imaging tool. The one or more components also include a diagnostic component configured for determining one or more causal portions of the image that resulted in the information being determined and for performing one or more functions based on the determined one or more causal portions of the image.


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