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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11574804 B1

PDFFull Text
Date of Patent:
Feb. 07, 2023

Filed:

Dec. 11, 2018

Workpiece processing and resin grinding apparatus

Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Shinya Watanabe, Tokyo, JP;

Ichiro Yamahata, Tokyo, JP;

Katsuhiko Suzuki, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:

Greer Burns & Crain, Ltd.

Primary Examiner:

Karl Kurple

Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/67 (2006.01); B24B 7/22 (2006.01); B05C 11/10 (2006.01); B24B 49/12 (2006.01); B24B 53/017 (2012.01); H01L 21/78 (2006.01); H01L 21/3105 (2006.01); H01L 21/304 (2006.01); B24B 41/00 (2006.01); B24B 37/00 (2012.01); B24B 49/04 (2006.01); B24B 37/34 (2012.01); B24B 49/02 (2006.01); B24B 7/10 (2006.01); B24B 37/08 (2012.01); B24B 53/007 (2006.01); B24B 49/03 (2006.01); B24B 55/02 (2006.01); B05B 3/00 (2006.01); B05C 9/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02013 (2013.01); B05B 3/00 (2013.01); B24B 7/10 (2013.01); B24B 7/228 (2013.01); B24B 37/00 (2013.01); B24B 37/08 (2013.01); B24B 37/34 (2013.01); B24B 37/345 (2013.01); B24B 41/005 (2013.01); B24B 49/02 (2013.01); B24B 49/03 (2013.01); B24B 49/04 (2013.01); B24B 49/12 (2013.01); B24B 53/007 (2013.01); B24B 53/017 (2013.01); B24B 55/02 (2013.01); H01L 21/02065 (2013.01); H01L 21/304 (2013.01); H01L 21/31058 (2013.01); H01L 21/67092 (2013.01); H01L 21/67253 (2013.01); H01L 21/78 (2013.01); B05C 9/12 (2013.01); B05C 11/1005 (2013.01);
Abstract

A processing apparatus used in processing a workpiece having a device in each of a plurality of regions that includes a chuck table holding the workpiece, positioning means positioning the workpiece before grinding, resin coating means including a rotatable spinner table for coating the workpiece with a resin, cleaning means, a grinding unit, and a transfer unit. The transfer unit includes a first transfer unit transferring the workpiece from the positioning means to the spinner table and from the spinner table to the chuck table, a second transfer unit transferring the workpiece from the chuck table to the cleaning means, and a front/back surface inversion transfer unit taking over the workpiece from the cleaning means to the second transfer unit.

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