The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2023
Filed:
Aug. 05, 2019
Asml Netherlands B. V., Veldhoven, NL;
Herman Philip Godfried, Amsterdam, NL;
Wilhelmus Patrick Elisabeth Maria Op 'T Root, Nederweert, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An apparatus () for increasing a pulse length of a pulsed radiation beam, the apparatus comprising: a beam splitter () configured to split an input radiation beam () into a first beam () and a second beam (); an optical arrangement (), wherein the beam splitter and the optical arrangement are configured such that at least a portion of the first beam is recombined with the second beam into a modified beam after an optical delay of the first beam caused by the optical arrangement; and at least one optical element () in an optical path of the first beam, the at least one optical element configured such that the phase of different parts of a wavefront of the first beam is varied to reduce coherence between the first beam and the second beam.