The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2023
Filed:
Oct. 19, 2020
Applicant:
Micron Technology, Inc., Boise, ID (US);
Inventors:
Mitsunari Sukekawa, Hiroshima, JP;
Shogo Omiya, Higashihiroshima, JP;
Yasutaka Iuchi, Higashihiroshima, JP;
Yoshinori Ikebuchi, Higashihiroshima, JP;
Assignee:
Micron Technology, Inc., Boise, ID (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 23/52 (2006.01); H01L 29/40 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 24/05 (2013.01); H01L 24/03 (2013.01); H01L 24/08 (2013.01); H01L 24/80 (2013.01); H01L 2224/03848 (2013.01); H01L 2224/05176 (2013.01); H01L 2224/08145 (2013.01); H01L 2224/80895 (2013.01); H01L 2224/80896 (2013.01); H01L 2924/01044 (2013.01); H01L 2924/0478 (2013.01); H01L 2924/13091 (2013.01); H01L 2924/1436 (2013.01);
Abstract
A method for forming a multilayer conductive structure includes forming a first conductive portion; forming a second conductive portion containing ruthenium (Ru) therein on the first conductive portion; forming a third conductive portion on the second conductive portion; and performing a silicidation process on the second conductive portion.
Sukekawa, Mitsunari. (2023). Semiconductor device and method of forming the same (U.S. Patent No. 11569185). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11569185
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile