The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2023
Filed:
Jan. 28, 2019
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16L 3/16 (2006.01); F16L 3/01 (2006.01); F16L 27/111 (2006.01); F16L 25/01 (2006.01); F25B 41/00 (2021.01); F16L 7/00 (2006.01);
U.S. Cl.
CPC ...
F16L 3/16 (2013.01); F16L 3/01 (2013.01); F16L 25/01 (2013.01); F16L 27/111 (2013.01); F25B 41/00 (2013.01); F16L 7/00 (2013.01);
Abstract
Energy consumption of a temperature control unit can be reduced. A flexible pipeincludes a bellows pipemade of a metal and an inner tube. The inner tubeis provided at an inner side of the bellows pipe, and an inner surface of the inner tube where a fluid flows is smooth. The inner surface of the inner tubewhere the fluid flows may be smoother than a surface of a braided body. Further, the inner tubemay be made of, for example, a conductive material. An inner side of the inner tubewhere the fluid flows may be coated with a conductive film.