The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2023
Filed:
Aug. 30, 2021
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
John Colin Travers, Edinburgh, GB;
Federico Belli, Edinburgh, GB;
Malte Christian Brahms, Edinburgh, GB;
Andreas Johannes Antonius Brouns, Eindhoven, NL;
Ronald Franciscus Herman Hugers, Best, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/35 (2006.01); G02B 6/02 (2006.01); H01S 3/067 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
H01S 3/06741 (2013.01); G02B 6/02328 (2013.01); G02F 1/3528 (2021.01); G03F 7/70625 (2013.01);
Abstract
A broadband radiation source device, including a fiber assembly having a plurality of optical fibers, each optical fiber being filled with a gas medium, wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of the plurality of optical fibers at any one time.