The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2023
Filed:
Jan. 07, 2022
Applicant:
Esol Inc., Hwaseong-si, KR;
Inventor:
Dong Gun Lee, Hwaseong-si, KR;
Assignee:
ESOL Inc., Hwaseong-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/84 (2012.01); G03F 1/24 (2012.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 1/84 (2013.01); G03F 1/24 (2013.01); G03F 7/70616 (2013.01);
Abstract
A reflectivity and transmittance measuring device includes: an EUV light source for outputting EUV light with a wavelength ranging from 5 nm to 15 nm; a multilayer reflection zone plate having an EUV reflection multilayer film, which is a planar substrate, and a zone plate pattern; and an EUV lighting unit for creating EUV illumination light by obtaining 1diffraction light reflected after radiating EUV light output from the EUV light source to the multilayer reflection zone plate.