The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2023
Filed:
Aug. 19, 2019
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Konstantin Forcht, Aalen, DE;
Dirk Doering, Erfurt-Hochheim, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 17/08 (2006.01); G02B 5/08 (2006.01); G02B 27/28 (2006.01); G02B 5/30 (2006.01);
U.S. Cl.
CPC ...
G02B 17/0892 (2013.01); G02B 5/0833 (2013.01); G02B 5/0858 (2013.01); G02B 5/0891 (2013.01); G02B 5/3091 (2013.01); G02B 17/084 (2013.01); G02B 17/0808 (2013.01); G02B 27/286 (2013.01); G02B 17/0856 (2013.01);
Abstract
A catadioptric lens includes at least two optical elements arranged along an optical axis. Both optical elements are configured as a mirror having a substrate and a highly reflective coating applied to an interface of the substrate. The highly reflective coating extends from the interface of the substrate along a surface normal. At least one of the highly reflective coatings has one or a plurality of layers. The optical total layer thickness of the one layer of the plurality of layers increases radially from the inner area outward.