The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2023
Filed:
Jan. 11, 2019
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Robert Wright, Jr., Newtown, CT (US);
Shuang Meng, Fremont, CA (US);
Bryan C. Hendrix, Danbury, CT (US);
Thomas H. Baum, New Fairfield, CT (US);
Philip S. H. Chen, Bethel, CT (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/32 (2006.01); C23C 16/08 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C23C 16/08 (2013.01); C23C 16/32 (2013.01);
Abstract
Described are vapor deposition methods for depositing molybdenum materials onto a substrate by the use of bis(alkyl-arene) molybdenum, also referred to herein as (alkyl-arene)Mo, for example bis(ethyl-benzene) molybdenum ((EtBz)Mo), as a precursor for such deposition, as well as structures that contain the deposited material.