The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2023
Filed:
Mar. 02, 2021
Infineon Technologies Austria Ag, Villach, AT;
Christian Koller, Stoecklweingarten, AT;
Ingo Daumiller, Oberaichwald, AT;
Lauri Knuuttila, Villach, AT;
Clemens Ostermaier, Villach, AT;
Infineon Technologies Austria AG, Villach, AT;
Abstract
A semiconductor device includes a semiconductor substrate including a barrier region, a channel layer disposed below the barrier region and forming a heterojunction with the barrier region such that a two-dimensional charge carrier gas channel is disposed in the channel layer near the heterojunction, and a sub-channel region disposed below the channel layer, and a first interface in the semiconductor substrate between a first region of type III-V material and a second region of type III-V material that is disposed below the first region of type III-V material, wherein the first and second regions of type III-V material form polarization charges on either side of the first interface, wherein the first interface is within or formed by the sub-channel region, and wherein semiconductor substrate has a vertically varying dopant concentration of deep energy acceptor dopant atoms that is locally increased at the first interface.