The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2023
Filed:
Jun. 15, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Kaushal Gangakhedkar, San Jose, CA (US);
Kallol Bera, Fremont, CA (US);
Joseph Yudovsky, Campbell, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68764 (2013.01); H01L 21/67017 (2013.01); H01L 21/6838 (2013.01); H01L 21/6875 (2013.01); H01L 21/68735 (2013.01); H01L 21/68757 (2013.01); H01L 21/68771 (2013.01); H01L 21/68785 (2013.01);
Abstract
Susceptor assemblies comprising a susceptor base and a plurality of pie-shaped skins thereon are described. A pie anchor can be positioned in the center of the susceptor base to hold the pie-shaped skins in place during processing.