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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11556057 B1

PDFFull Text
Date of Patent:
Jan. 17, 2023

Filed:

Dec. 02, 2019

Surface treatment of titanium containing hardmasks

Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Ekmini A. De Silva, Slingerlands, NY (US);

Dario Goldfarb, Dobbs Ferry, NY (US);

Indira Seshadri, Niskayuna, NY (US);

Assignee:

International Business Machines Corporation, Armonk, NY (US);

Attorneys:

Cantor Colburn LLP

Abdy Raissinia

Primary Examiner:

Amanda C Walke

Int. Cl.
CPC ...
G03F 7/11 (2006.01); G03F 7/42 (2006.01); G03F 7/16 (2006.01); G03F 7/09 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); G03F 7/094 (2013.01); G03F 7/165 (2013.01); G03F 7/422 (2013.01); G03F 7/425 (2013.01); G03F 7/30 (2013.01);
Abstract

A surface treatment composition and methods for improving adhesion of an organic layer on a titanium-containing hardmask includes forming a self-assembled monolayer on a surface of the titanium-containing hardmask prior to depositing the organic layer. The self-assembled monolayer is formed from a blend of alkyl phosphonic acids of formula (I): X(CH)POOH(I), wherein n is 6 to 16 and X is either CHor COOH, wherein a ratio of the methyl terminated (CH) alkyl phosphonic acid to the carboxyl terminated (COOH) alkyl phosphonic acid ranges from 25:75 to 75:25.

Find Patent Forward Citations

De Silva, Ekmini. (2023). Surface treatment of titanium containing hardmasks (U.S. Patent No. 11556057). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11556057

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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