The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 10, 2023

Filed:

Apr. 17, 2020
Applicant:

Entegris, Inc., Billerica, MA (US);

Inventors:

Shawn D. Eggum, Lonsdale, MN (US);

Mark V. Smith, Colorado Springs, CO (US);

Matthew A. Fuller, Colorado Springs, CO (US);

Assignee:

ENTEGRIS, INC., Billerica, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/677 (2006.01); F16K 27/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67393 (2013.01); F16K 27/0209 (2013.01); H01L 21/6773 (2013.01); H01L 21/67373 (2013.01); H01L 21/67376 (2013.01); H01L 21/67386 (2013.01); H01L 21/67766 (2013.01); H01L 21/67769 (2013.01);
Abstract

A substrate container including a plate, a shell, a connector, and a seal, where the connector is threaded and secured via a nut, and the seal contacts each of the shell, plate, and connector. The plate has a recess accommodating an end of the connector and the nut. Field-serviceable, removable purge modules including check valves may be used with the substrate container, and may be secured to the substrate container in the recess in the plate. Filters may be secured to the connector or included in the purge modules. These filters may have diameters larger than an internal diameter of the connector.


Find Patent Forward Citations

Loading…