The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 10, 2023

Filed:

Jul. 26, 2019
Applicants:

Riken, Wako, JP;

University Public Corporation Osaka, Osaka, JP;

Inventors:

Ken Harada, Saitama, JP;

Keiko Shimada, Saitama, JP;

Shigeo Mori, Osaka, JP;

Atsuhiro Kotani, Osaka, JP;

Assignees:

RIKEN, Saitama, JP;

UNIVERSITY PUBLIC CORPORATION OSAKA, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); G01N 23/201 (2018.01); H01J 37/09 (2006.01); H01J 37/10 (2006.01); H01J 37/147 (2006.01); H01J 37/20 (2006.01); H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/265 (2013.01); G01N 23/201 (2013.01); H01J 37/09 (2013.01); H01J 37/10 (2013.01); H01J 37/147 (2013.01); H01J 37/20 (2013.01); H01J 37/226 (2013.01); H01J 37/263 (2013.01); H01J 2237/0451 (2013.01); H01J 2237/2614 (2013.01);
Abstract

An observation apparatus and method that avoids drawbacks of a Lorentz method and observes a weak scatterer or a phase object with in-focus, high resolution, and no azimuth dependency, by a Foucault method observation using a hollow-cone illumination that orbits and illuminates an incident electron beam having a predetermined inclination angle, an electron wave is converged at a position (height) of an aperture plate downstream of a sample, and a bright field condition in which a direct transmitted electron wave of the sample passes through the aperture plate, a dark field condition in which the transmitted electron wave is shielded, and a Schlieren condition in which approximately half of the transmitted wave is shielded as a boundary condition of both of the above conditions are controlled, and a spatial resolution of the observation image is controlled by selecting multiple diameters and shapes of the opening of the aperture plate.


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