The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2023
Filed:
Sep. 25, 2019
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Andrey Nikipelov, Eindhoven, NL;
Johan Franciscus Maria Beckers, Veldhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); C23C 16/40 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7095 (2013.01); C23C 14/08 (2013.01); C23C 16/401 (2013.01); G03F 7/7085 (2013.01); G03F 7/70341 (2013.01);
Abstract
An object, such as a sensor for an immersion lithographic apparatus, has an outer layer which comes in contact with immersion liquid and wherein the outer layer has a composition including a rare earth element. There is also provided an immersion lithographic apparatus having such an object and a method for manufacturing such an object.