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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11545557 B1

PDFFull Text
Date of Patent:
Jan. 03, 2023

Filed:

Apr. 07, 2021

Semiconductor device and fabrication method thereof

Applicant:

United Microelectronics Corp., Hsin-Chu, TW;

Inventors:

Chia-Wei Chang, Tainan, TW;

Chia-Ming Kuo, Kaohsiung, TW;

Po-Jen Chuang, Kaohsiung, TW;

Fu-Jung Chuang, Kaohsiung, TW;

Shao-Wei Wang, Taichung, TW;

Yu-Ren Wang, Tainan, TW;

Chia-Yuan Chang, Kaohsiung, TW;

Assignee:

UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;

Attorney:

Winston Hsu

Primary Examiner:

Julia Slutsker

Int. Cl.
CPC ...
H01L 29/49 (2006.01); H01L 29/78 (2006.01); H01L 29/08 (2006.01); H01L 29/24 (2006.01); H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
H01L 29/4983 (2013.01); H01L 21/0234 (2013.01); H01L 21/02332 (2013.01); H01L 21/02521 (2013.01); H01L 21/28123 (2013.01); H01L 29/0847 (2013.01); H01L 29/24 (2013.01); H01L 29/66545 (2013.01); H01L 29/66795 (2013.01); H01L 29/7851 (2013.01);
Abstract

A semiconductor device includes substrate having a fin structure thereon, a gate structure overlying the fin structure, a polymer block at a corner between the gate structure and the fin structure, and a source/drain region on the fin structure. The polymer block includes a nitridation layer in proximity to a sidewall of the gate structure.

Find Patent Forward Citations

Chang, Chia-Wei. (2023). Semiconductor device and fabrication method thereof (U.S. Patent No. 11545557). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11545557

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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