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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11545386 B1

PDFFull Text
Date of Patent:
Jan. 03, 2023

Filed:

Jan. 13, 2020

Workpiece unit

Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Yoshinobu Saito, Tokyo, JP;

Masayuki Matsubara, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:

Greer Burns & Crain, Ltd.

Primary Examiner:

Nikolay K Yushin

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01); G01J 1/50 (2006.01); G01K 11/12 (2021.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6836 (2013.01); G01J 1/50 (2013.01); G01K 11/12 (2013.01); H01L 21/67253 (2013.01); H01J 37/3244 (2013.01); H01J 37/32183 (2013.01); H01J 37/32724 (2013.01); H01J 37/32834 (2013.01); H01J 2237/3341 (2013.01); H01L 21/67069 (2013.01); H01L 21/6833 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68381 (2013.01);
Abstract

A workpiece unit that includes a workpiece, a tape stuck to the workpiece; and an annular frame to which an outer circumferential edge of the tape is stuck and which has an opening defined centrally therein. The workpiece is disposed in the opening in the annular frame and supported on the annular frame by the tape, and at least one of the tape and the annular frame has an irreversible discoloring section that discolors in response to an external stimulus. Such a configuration makes it possible to determine whether or not a process involving an external stimulus has been carried out on the workpiece unit, based on the appearance of the workpiece unit (i.e., based on whether the irreversible discoloring section has been discolored or not).

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