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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11545381 B1

PDFFull Text
Date of Patent:
Jan. 03, 2023

Filed:

Feb. 23, 2017

Substrate transporting method and substrate processing system

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventor:

Keisuke Kondoh, Nirasaki, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorneys:

Nath, Goldberg & Meyer

Jerald L. Meyer

Tanya E. Harkins

Primary Examiner:

Jarrett J Stark

Int. Cl.
CPC ...
H01L 21/677 (2006.01); B25J 13/08 (2006.01); B65G 49/06 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); B25J 13/08 (2013.01); B65G 49/061 (2013.01); H01L 21/67259 (2013.01); H01L 21/67778 (2013.01); H01L 21/68 (2013.01); H01L 21/682 (2013.01);
Abstract

Provided is a substrate transferring method which is capable of accurately mounting a substrate at a desired rotation angle. In order to eliminate a misalignment of a wafer W in a rotational direction in a vacuum process chamber, which is caused by a variation in a transfer distance of the wafer W, the wafer W is mounted on a stage while being offset from the center of the stage in a load lock chamber and an angle of rotation of the wafer W with respect to a fork when a transfer arm receives the wafer W is changed.

Find Patent Forward Citations

Kondoh, Keisuke. (2023). Substrate transporting method and substrate processing system (U.S. Patent No. 11545381). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11545381

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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