The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Mar. 06, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Yaoling Pan, Santa Clara, CA (US);
Patrick John Tae, Palo Alto, CA (US);
Michael D. Willwerth, Campbell, CA (US);
Leonard Tedeschi, San Jose, CA (US);
Kiyki-Shiy N. Shang, Santa Clara, CA (US);
Mikhail V. Taraboukhine, Santa Clara, CA (US);
Charles R. Hardy, San Jose, CA (US);
Sivasankar Nagarajan, Bangalore, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Capacitive sensors and capacitive sensing data integration for plasma chamber condition monitoring are described. In an example, a plasma chamber monitoring system includes a plurality of capacitive sensors, a capacitance digital converter, and an applied process server coupled to the capacitance digital converter, the applied process server including a system software. The capacitance digital converter includes an isolation interface coupled to the plurality of capacitive sensors, a power supply coupled to the isolation interface, a field-programmable gate-array firmware coupled to the isolation interface, and an application-specific integrated circuit coupled to the field-programmable gate-array firmware.