The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Nov. 04, 2020
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Jong Hwan An, Yongin-si, KR;
Shin-Woo Nam, Yongin-si, KR;
Hong Won Lee, Yongin-si, KR;
Jae Bak Shim, Seoul, KR;
Assignee:
SEMES CO., LTD., Cheonan-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); G01R 23/04 (2006.01); G01R 23/10 (2006.01); G01R 29/02 (2006.01); H02M 7/04 (2006.01); H03H 7/24 (2006.01); H03H 7/38 (2006.01); G01R 21/12 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32146 (2013.01); G01R 23/04 (2013.01); G01R 23/10 (2013.01); G01R 29/02 (2013.01); H01J 37/32174 (2013.01); H01J 37/32935 (2013.01); H02M 7/04 (2013.01); H03H 7/24 (2013.01); H03H 7/38 (2013.01); G01R 21/12 (2013.01); H01J 2237/334 (2013.01);
Abstract
Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.