The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Sep. 11, 2017
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Tomohisa Hoshino, Kumamoto, JP;
Masato Hamada, Kumamoto, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 17/12 (2006.01); H01L 21/66 (2006.01); H01L 21/288 (2006.01); C25D 17/00 (2006.01); C25D 21/12 (2006.01);
U.S. Cl.
CPC ...
C25D 17/12 (2013.01); C25D 17/001 (2013.01); C25D 21/12 (2013.01); H01L 21/2885 (2013.01); H01L 22/10 (2013.01); H01L 22/14 (2013.01);
Abstract
An electrolytic processing jig configured to perform an electrolytic processing on a processing target substrate includes a base body having a flat plate shape; an electrode provided at the base body; three or more terminals provided at the base body, each having elasticity and configured to be brought into contact with a peripheral portion of the processing target substrate; and a detecting unit configured to electrically detect a contact of at least one of the terminals with the processing target substrate.