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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11538810 B1

PDFFull Text
Date of Patent:
Dec. 27, 2022

Filed:

Apr. 08, 2021

Wiring structures, methods of forming the same, and semiconductor devices including the same

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Hyunseok Lim, Suwon-si, KR;

Minhyuk Cho, Suwon-si, KR;

Kyung-Eun Byun, Suwon-si, KR;

Hyeonjin Shin, Suwon-si, KR;

Kaoru Yamamoto, Suwon-si, KR;

Jungsoo Yoon, Suwon-si, KR;

Soyoung Lee, Suwon-si, KR;

Geuno Jeong, Suwon-si, KR;

Assignee:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Attorney:

Lee IP Law, P.C.

Primary Examiner:

Steven M Christopher

Int. Cl.
CPC ...
H01L 27/108 (2006.01);
U.S. Cl.
CPC ...
H01L 27/10814 (2013.01); H01L 27/10823 (2013.01); H01L 27/10855 (2013.01); H01L 27/10876 (2013.01); H01L 27/10885 (2013.01); H01L 27/10888 (2013.01);
Abstract

A wiring structure includes a first conductive pattern including doped polysilicon on a substrate, an ohmic contact pattern including a metal silicide on the first conductive pattern, an oxidation prevention pattern including a metal silicon nitride on the ohmic contact pattern, a diffusion barrier including graphene on the oxidation prevention pattern, and a second conductive pattern including a metal on the diffusion barrier.

Find Patent Forward Citations

Lim, Hyunseok. (2022). Wiring structures, methods of forming the same, and semiconductor devices including the same (U.S. Patent No. 11538810). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11538810

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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