The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2022
Filed:
Apr. 14, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Alexander N. Lerner, San Jose, CA (US);
Michael P. Karazim, San Jose, CA (US);
Andrew J. Constant, Cupertino, CA (US);
Jeffrey A. Brodine, Los Gatos, CA (US);
Kim Ramkumar Vellore, San Jose, CA (US);
Kevin Moraes, Mountain View, CA (US);
Roey Shaviv, Palo Alto, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An alignment module for positioning a mask on a substrate comprises a mask stocker, an alignment stage, and a transfer robot. The mask stocker houses a mask cassette that stores a plurality of masks. The alignment stage is configured to support a carrier and a substrate. The transfer robot is configured to transfer one of the one or more masks from the mask stocker to the alignment stage and position the mask over the substrate. The alignment module may be part of an integrated platform having one or more transfer chambers, a factory interface having a substrate carrier chamber and one or more processing chambers. A carrier may be coupled to a substrate within the substrate carrier chamber and moved between the processing chambers to generate a semiconductor device.