The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2022
Filed:
Oct. 25, 2018
Hitachi High-tech Corporation, Tokyo, JP;
Mitsuhiro Nakamura, Tokyo, JP;
Michio Hatano, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
Provided are a charged particle beam device and a detector capable of non-invasively observing a biochemical sample without a staining treatment or an immobilization treatment, with a simple and high observation throughput. An electron optics system, a stage, a sample chamberholding a sample and including a first insulating layerthat is in contact with the sample, and a conductive layerthat is formed on the first insulating layer, signal detection circuitsandconnected to the conductive layer and detecting a current flowing through the conductive layer, and a main control unitfor controlling the electron optics system and the stage, wherein the main control unitirradiates the conductive layer of the sample chamber placed on the stage with an electron beam from the electron optics system and is input with a detection signal from the signal detection circuit.