The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2022
Filed:
Aug. 27, 2021
Applicant:
Nuflare Technology, Inc., Yokohama, JP;
Inventors:
Assignee:
NuFlare Technology, Inc., Yokohama, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); H01J 37/28 (2006.01); G01N 23/2251 (2018.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); G01N 23/2251 (2013.01); H01J 37/28 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/2806 (2013.01); H01J 2237/2817 (2013.01);
Abstract
According to one aspect of the present invention, a θ stage mechanism includes a fixed shaft; a plurality of bearings in which outer rings roll on an outer peripheral surface of the fixed shaft; a plurality of cylindrical members supported in a state of being inserted inside inner rings of the plurality of bearings; and a table that is arranged on the plurality of cylindrical members and moves in a rotational direction about a center of the fixed shaft by the plurality of bearings rolling on an outer peripheral surface of the fixed shaft.