The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2022
Filed:
Nov. 15, 2019
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Edwin Verschueren, Mierlo, NL;
Paul Tacx, Roermond, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/02 (2006.01); H01J 37/28 (2006.01); H02N 2/06 (2006.01);
U.S. Cl.
CPC ...
H01J 37/023 (2013.01); H01J 37/28 (2013.01); H02N 2/062 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/20264 (2013.01); H01J 2237/20285 (2013.01); H01J 2237/2802 (2013.01);
Abstract
To compensate for hysteresis in an actuator, a path between a first position and a second position can be selected, and a drive signal can be applied to an actuator element that includes a hysteresis-compensated portion to move an object along the selected path.