The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2022
Filed:
Jan. 30, 2018
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Yuerui Chen, Shanghai, CN;
Xin Li, Shanghai, CN;
Assignee:
KLA-TENCOR CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06N 3/04 (2006.01); G06F 17/16 (2006.01); G06N 3/08 (2006.01); H01L 21/66 (2006.01); G03F 7/20 (2006.01); G01N 21/47 (2006.01); G01N 21/21 (2006.01); G01N 21/95 (2006.01); G06N 20/10 (2019.01);
U.S. Cl.
CPC ...
G06N 3/04 (2013.01); G03F 7/70625 (2013.01); G06F 17/16 (2013.01); G06N 3/08 (2013.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01); G01N 21/9501 (2013.01); G01N 2021/213 (2013.01); G01N 2021/479 (2013.01); G06N 20/10 (2019.01);
Abstract
Techniques and systems for critical dimension metrology are disclosed. Critical parameters can be constrained with at least one floating parameter and one or more weight coefficients. A neural network is trained to use a model that includes a Jacobian matrix. During training, at least one of the weight coefficients is adjusted, a regression is performed on reference spectra, and a root-mean-square error between the critical parameters and the reference spectra is determined. The training may be repeated until the root-mean-square error is less than a convergence threshold.