The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2022

Filed:

Jun. 03, 2020
Applicant:

Mpi Corporation, Hsinchu County, TW;

Inventors:

Kang-Yen Fu, Hsinchu County, TW;

Ya-Hung Lo, Hsinchu County, TW;

Shou-Jen Tsai, Hsinchu County, TW;

Wei-Cheng Ku, Hsinchu County, TW;

Assignee:

MPI CORPORATION, Hsinchu County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); H01L 21/67 (2006.01); G01R 1/073 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2831 (2013.01); G01R 1/07328 (2013.01); H01L 21/67242 (2013.01);
Abstract

A probing apparatus includes a frame, a testing device, a rotatable testing platform, and a probe module. The testing device is disposed on the frame and is displaceable along an X direction and a Y direction perpendicular to the X direction. The rotatable testing platform is disposed on the frame and is rotatable around a rotating axis extending in the X direction. A direction perpendicular to the X direction and the Y direction is a Z direction, and the rotatable testing platform and the testing device are located at different positions of the Z direction. The probe module is disposed on the rotatable testing platform.


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