The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2022

Filed:

May. 14, 2020
Applicants:

Tatsuji Nagaoka, Nagakute, JP;

Hiroyuki Nishinaka, Kyoto, JP;

Masahiro Yoshimoto, Kyoto, JP;

Inventors:

Tatsuji Nagaoka, Nagakute, JP;

Hiroyuki Nishinaka, Kyoto, JP;

Masahiro Yoshimoto, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 17/06 (2006.01); B05B 7/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
B05B 17/0615 (2013.01); B05B 7/0012 (2013.01); H01L 21/02628 (2013.01);
Abstract

A mist generator may include a reservoir storing a solution, a plurality of ultrasonic vibrators, a mist delivery path, and a mist collector. The plurality of ultrasonic vibrators may be disposed under the reservoir and configured to apply ultrasonic vibration to the solution stored in the reservoir to generate mist of the solution in the reservoir. The mist delivery path may be configured to deliver the mist from an inside of the reservoir to an outside of the reservoir. The mist collector may be disposed above the solution in the reservoir, wherein an upper end of the mist collector may be connected to an upstream end of the mist delivery path, a lower end of the mist collector may include an opening, and a width of the mist collector may increase from the upper end toward the opening. The plurality of ultrasonic vibrators may be located directly under the opening.


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