The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 20, 2022

Filed:

Sep. 30, 2019
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Hsiang-Jen Tseng, Hsinchu, TW;

Wei-Yu Chen, Hsinchu, TW;

Ting-Wei Chiang, New Taipei, TW;

Li-Chun Tien, Tainan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 25/065 (2006.01); H01L 23/528 (2006.01); H01L 25/00 (2006.01); H01L 21/768 (2006.01); H01L 23/48 (2006.01); H01L 21/822 (2006.01); H01L 27/06 (2006.01); H01L 23/535 (2006.01); H01L 21/74 (2006.01); H01L 25/07 (2006.01); H01L 27/118 (2006.01); H01L 23/522 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 24/25 (2013.01); H01L 21/743 (2013.01); H01L 21/76838 (2013.01); H01L 21/8221 (2013.01); H01L 23/481 (2013.01); H01L 23/528 (2013.01); H01L 23/535 (2013.01); H01L 24/29 (2013.01); H01L 24/32 (2013.01); H01L 24/48 (2013.01); H01L 24/73 (2013.01); H01L 24/83 (2013.01); H01L 25/0652 (2013.01); H01L 25/0657 (2013.01); H01L 25/074 (2013.01); H01L 25/50 (2013.01); H01L 27/0688 (2013.01); H01L 21/76898 (2013.01); H01L 23/522 (2013.01); H01L 23/53223 (2013.01); H01L 23/53238 (2013.01); H01L 23/53252 (2013.01); H01L 23/53266 (2013.01); H01L 24/13 (2013.01); H01L 2027/11887 (2013.01); H01L 2224/48227 (2013.01); H01L 2225/06527 (2013.01); H01L 2225/06541 (2013.01); H01L 2225/06548 (2013.01); H01L 2924/00014 (2013.01); H01L 2924/13091 (2013.01); H01L 2924/207 (2013.01);
Abstract

The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a first device tier including a first semiconductor substrate having a first plurality of devices. A second semiconductor substrate is formed over the first device tier. A first conductive layer is formed within the second semiconductor substrate, and a second conductive layer is formed within the second semiconductor substrate and over the first conductive layer. The first conductive layer and the second conductive layer have different patterns as viewed from a top-view. A second plurality of devices are formed on the second semiconductor substrate. The first and second conductive layers are configured to electrically couple the first plurality of devices and the second plurality of devices.


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