The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2022
Filed:
Aug. 20, 2021
Onto Innovation, Inc., Wilmington, MA (US);
Elvino da Silveira, North Andover, MA (US);
Keith F. Best, Tewksbury, MA (US);
Wayne Fitzgerald, Meylan, FR;
Jian Lu, Chelmsford, MA (US);
Xin Song, Andover, MA (US);
J. Casey Donaher, Westford, MA (US);
Christopher J. McLaughlin, Wilmington, MA (US);
Onto Innovation Inc., Wilmington, MA (US);
Abstract
A method for correcting misalignments is provided. An alignment for each device of a group of devices mounted on a substrate is determined. An alignment error for the group of devices mounted on the substrate is determined based on the respective alignment for each device. One or more correction factors are calculated based on the alignment error. The alignment error is corrected based on the one or more correction factors.