The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 20, 2022

Filed:

Jun. 03, 2020
Applicant:

Mitutoyo Corporation, Kanagawa, JP;

Inventor:

Shinji Komatsuzaki, Ibaraki, JP;

Assignee:

Mitutoyo Corporation, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01S 17/34 (2020.01); G01S 7/497 (2006.01); H01S 3/083 (2006.01); H01S 3/067 (2006.01);
U.S. Cl.
CPC ...
G01S 17/34 (2020.01); G01S 7/497 (2013.01); H01S 3/06791 (2013.01); H01S 3/083 (2013.01);
Abstract

A measurement apparatus that includes a laser apparatus outputting a frequency-modulated laser beam, a branching part branching the frequency-modulated laser beam into a reference light and a measurement light, a beat signal generation part generating a beat signal by mixing the reference light and a reflected light that is reflected by radiating the measurement light onto an object to be measured, an extraction part extracting a signal component corresponding to a resonator frequency of the frequency-modulated laser beam, a clock signal generation part generating a first clock signal on the basis of the signal component, a conversion part converting the beat signal into a first digital signal using the first clock signal, and a calculation part calculating a difference in a propagation distance between the reference light and the measurement light on the basis of the first digital signal.


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