The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 13, 2022

Filed:

Dec. 31, 2019
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Tsung-Sheng Kuo, New Taipei, TW;

Yang-Ann Chu, Hsinchu, TW;

Chih-Hung Huang, Hsinchu County, TW;

Guan-Wei Huang, Hsinchu County, TW;

Jiun-Rong Pai, Jhubei, TW;

Hsuan Lee, Tainan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B65G 1/137 (2006.01); B65G 47/90 (2006.01); B65G 47/46 (2006.01); H01L 21/673 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6773 (2013.01); B65G 1/1373 (2013.01); B65G 47/46 (2013.01); B65G 47/90 (2013.01); H01L 21/67736 (2013.01); H01L 21/67745 (2013.01); H01L 21/67766 (2013.01); B65G 2201/0297 (2013.01); H01L 21/67271 (2013.01); H01L 21/67333 (2013.01); H01L 21/67721 (2013.01); H01L 21/67733 (2013.01); H01L 21/67769 (2013.01); H01L 2221/67 (2013.01);
Abstract

A system, includes, a semiconductor processing unit, an Automated Materials Handling System (AMHS) vehicle, and a warehouse apparatus, wherein the warehouse apparatus comprises at least one input port, at least one output port, and at least one load/unload port, wherein the warehouse apparatus is configured to perform one of the following: receiving a plurality of tray cassette containers from the AMHS vehicle at the at least one input port, transporting at least one tray cassette in each of a plurality of tray cassette containers to the at least one load/unload port via the at least one input port, transporting at least one first tray from the at least one tray cassette to the semiconductor processing unit via a tray feeder conveyor, and receiving at least one second tray from the semiconductor processing unit via the tray feeder conveyor.


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