The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2022
Filed:
Jan. 03, 2018
Tokyo Electron Limited, Tokyo, JP;
Ian Colgan, County Meath, IE;
Ioan Domsa, Dublin, IE;
George Eyres, Dublin, IE;
Toru Ishii, Dublin, IE;
Makoto Saito, Dublin, IE;
David Hurley, Dublin, IE;
Noel O'Shaughnessy, Dublin, IE;
Barry Clarke, Dublin, IE;
Gerhardus Van Der Linde, Dublin, IE;
Pat Hughes, Dublin, IE;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
An apparatus for magnetic annealing one or more workpieces, and a method of operating the apparatus, are described. The apparatus includes: a workpiece holder configured to support one or more workpieces, wherein the one or more workpieces having at least one substantially planar surface; an optional workpiece heating system configured to elevate the one or more workpieces to an anneal temperature; and a magnet assembly having a first magnet and a second magnet, the first and second magnets defining a gap between opposing poles of each magnet, wherein the magnet assembly is arranged to generate a magnetic field substantially perpendicular to the planar surface of the one or more workpieces.