The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2022
Filed:
Jun. 09, 2020
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Inventors:
Assignee:
MURATA MANUFACTURING CO., LTD., Nagaokakyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G01S 7/481 (2006.01); G02B 26/10 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0858 (2013.01); G01S 7/4817 (2013.01); G02B 26/105 (2013.01);
Abstract
The invention relates to microelectromechanical systems (MEMS), and specifically to a mirror system, for example to be used in LiDAR (Light Detection and Ranging). The MEMS mirror system of the invention uses four suspenders, each of which is connected to the reflector body at two separate connection points which can be independently displaced by piezoelectric actuators. By actuating adjacent and opposite pairs of piezoelectric actuators, the reflector body can be driven to oscillated about two orthogonal axes.