The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2022
Filed:
Jul. 16, 2019
Fujikin Incorporated, Osaka, JP;
Masaaki Nagase, Osaka, JP;
Satoru Yamashita, Osaka, JP;
Masayoshi Kawashima, Osaka, JP;
Masahiko Takimoto, Osaka, JP;
Kouji Nishino, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
FUJIKIN INCORPORATED, Osaka, JP;
Abstract
A control unitof a flow rate control systemcomprises: a recording unitfor recording measured values of a pressure sensor P and a temperature sensor T, a storage unitfor storing volume data between a first valve Vand a second valve Vcorresponding to the measured value of the pressure sensor P, and an arithmetic unitfor calculating a flow rate based on a first pressure value Pand a first temperature value Tmeasured after opening the first valve Vand the second valve Vto flow a gas and then closing the first valve Vand the second valve Vsimultaneously in a state where the gas is flowing; a second pressure value Pand a second temperature value Tmeasured after opening the first valve Vand the second valve Vto flow a gas, closing the second valve Vin a state where the gas is flowing, and then closing the first valve Vafter a predetermined time Δt has elapsed; and a volume value V between the first valve Vand the second valve Vwhich corresponds to the second pressure value P