The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2022
Filed:
Dec. 05, 2019
Applicant:
Singulus Technologies Ag, Kahl am Main, DE;
Inventors:
Assignee:
SINGULUS TECHNOLOGIES AG, Kahl am Main, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/54 (2006.01); C23C 14/34 (2006.01); G01B 11/06 (2006.01);
U.S. Cl.
CPC ...
C23C 14/545 (2013.01); C23C 14/34 (2013.01); G01B 11/0683 (2013.01);
Abstract
The disclosure relates to a method of determining a velocity profile for the movement of a substrate to be coated relative to a coating source.