The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2022
Filed:
Jul. 22, 2019
Applicant:
Showa Denko Materials Co., Ltd., Tokyo, JP;
Inventors:
Assignee:
SHOWA DENKO MATERIALS CO., LTD., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09K 3/14 (2006.01); C09G 1/02 (2006.01); H01L 21/3105 (2006.01); B24B 37/04 (2012.01); H01L 21/66 (2006.01); H01L 21/304 (2006.01); C01F 17/235 (2020.01);
U.S. Cl.
CPC ...
C09K 3/1454 (2013.01); B24B 37/042 (2013.01); C09G 1/02 (2013.01); C09K 3/1409 (2013.01); H01L 21/304 (2013.01); H01L 21/31053 (2013.01); H01L 22/26 (2013.01); C01F 17/235 (2020.01); C01P 2002/85 (2013.01); C01P 2004/64 (2013.01); C01P 2006/40 (2013.01);
Abstract
A slurry containing abrasive grains and a liquid medium, in which the abrasive grains include first particles and second particles in contact with the first particles, a particle size of the second particles is smaller than a particle size of the first particles, the first particles contain cerium oxide, the second particles contain a cerium compound, and in a case where a content of the abrasive grains is 0.1% by mass, an absorbance for light having a wavelength of 380 nm in a liquid phase obtained when the slurry is subjected to centrifugal separation for 5 minutes at a centrifugal acceleration of 5.8×10G exceeds 0.