The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2022
Filed:
Dec. 07, 2021
Nanya Technology Corporation, New Taipei, TW;
Chin-Ling Huang, Taoyuan, TW;
NANYA TECHNOLOGY CORPORATION, New Taipei, TW;
Abstract
The present application discloses a method for fabricating a semiconductor device with a programmable feature such as anti-fuse The method includes forming a semiconductor fin on a buried insulating layer; forming a dummy gate structure on the semiconductor fin; forming a top insulating layer over the semiconductor fin and covering the dummy gate structure; removing the dummy gate structure and concurrently forming a first trench in the top insulating layer; performing an etch process in the first trench to form a tapered pit separating the semiconductor fin; forming a first insulating layer to completely fill the first trench and the tapered pit; and replacing the semiconductor fin with first conductive blocks.