The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2022
Filed:
Jun. 10, 2020
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Katsuyuki Koizumi, Miyagi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68742 (2013.01); H01J 37/32642 (2013.01); H01J 37/32715 (2013.01); H01L 21/67069 (2013.01); H01L 21/6831 (2013.01); H01L 21/68735 (2013.01); H01J 2237/334 (2013.01);
Abstract
A substrate processing apparatus includes a stage including a first section and a second section, pins, a lifter configured to raise and lower the pins, and a controller configured to control the lifter. On the first section, a substrate is placed. On the second section, an edge ring is placed. The second section is provided at a periphery of the first section. Also, at the second section, holes are provided. The pins are provided in the respective holes so as to move up and down through the holes.